| 摘要 |
PROBLEM TO BE SOLVED: To prevent errors due to an erroneous parameter in an exposing treatment step. SOLUTION: In an aligner, units 222 to 225 are controlled on the basis of set values of parameters for exposure treatment. The aligner is provided with checking means 201, 210, and 221 for checking whether each parameter is adequate for required conditions for each unit or not prior to the exposure treatment.
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