Thin film supporting base structure

摘要

A base structure for supporting a thin film with a specific temperature coefficient of resistance (TCR) includes: A base made of borax-silicon glass; The top of the base is covered with an interface layer of LaSiONx; The thin film supported by the base includes a platinum thin film; An adhesive fixing mechanism is located on top of the joint layer, as the interface between the thin film and the base, for firmly adhering the thin film on the base; and The joint layer, located on the edge of the thin film, on which there is a nickel-chromium alloy fixing mechanism forming a solder pad on the thin film.