发明名称 FLEXIBLE SEAL FOR A LASER SYSTEM
摘要 A flexible seal (200) permits slidable access to equipment components in an essentially zero clearance environment, without time-consuming disassembly and reassembly. A flexible seal ring (200) includes a thickened radiused boss (210) connected to the outer rim of a flexible flange (214), connected to a mounting block (218) by an inner hub (216). The seal ring (200) is attached to a first plate (324). A second plate (340) slides laterally to align with the first plate (324), contacting the flexible seal surface (210). This presses the seal surface (210) against the second plate (340), sealing the interface.
申请公布号 WO0001966(A1) 申请公布日期 2000.01.13
申请号 WO1999US12972 申请日期 1999.06.09
申请人 CYMER, INC.;THOMPSON, PAUL, S. 发明人 THOMPSON, PAUL, S.
分类号 F16J15/08;(IPC1-7):F16J15/08 主分类号 F16J15/08
代理机构 代理人
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