| 摘要 |
A double side polishing machine includes a disk-shaped carrier for holding an article to be polished, and a sun gear and an internal gear which are meshed with external teeth of the carrier. The tooth portions of the sun gear and the internal gear are made of a hard resin material, such as polyimide sintered body or polyamide imide resin, which has excellent wear resistance, sufficient self-lubricating performance, and high shear resistance. Each tooth portion is formed as a single member, or is formed by a plurality of separable segments. Alternatively, the internal and sun gears are made of a metal such as steel and coated with a hard resin coating material. In another double side polishing machine, each of the tooth portions of the internal and sun gears is formed by a plurality of pins disposed at a predetermined pitches and sleeves fit onto the pins. The sleeves are made of a resin. Alternatively, resin-coated metallic sleeves may be used as the sleeves. The double side polishing machines can prevent generation of metal powder, thereby suppressing generation of scratches and metal contamination. <IMAGE> |
