发明名称 TRACE METAL ION REDUCTION BY ION EXCHANGE PACK
摘要 <p>The present invention provides methods for solutions having a very low level of metal ions, utilizing a specially designed Ion Exchange Pack. A method is also provided for producing photoresist composition having a very low level of metal ions from novolak resins purified in a process using such an Ion Exchange Pack.</p>
申请公布号 WO2000001487(A2) 申请公布日期 2000.01.13
申请号 EP1999004430 申请日期 1999.06.25
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