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经营范围
发明名称
Washing unit for joint seal in a semiconductor bath system
摘要
申请公布号
GB9927123(D0)
申请公布日期
2000.01.12
申请号
GB19990027123
申请日期
1998.05.22
申请人
MIRANDA, HENRY R
发明人
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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