发明名称 SEMICONDUCTOR SUBSTRATE AND SEMICONDUCTOR DEVICE
摘要 <p>A MOS transistor is composed of a semiconductor substrate 11 in which a Si thin film 13 is heteroepitaxially grown on a surface of an SiC substrate 12. A source electrode 38 and a drain electrode 34 are so provided that the above SiC substrate 12 is disposed in an output current path. According to this construction, a semiconductor device with a high dielectric strength and current-carrying capacity is achieved. <IMAGE></p>
申请公布号 EP0971394(A1) 申请公布日期 2000.01.12
申请号 EP19980936742 申请日期 1998.08.11
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 KITABATAKE, MAKOTO
分类号 H01L21/04;H01L21/78;H01L29/24;H01L29/267;H01L29/78;(IPC1-7):H01L21/20;H01L21/203;H01L21/205;H01L29/73;H01L21/331;H01L29/739;H01L21/336 主分类号 H01L21/04
代理机构 代理人
主权项
地址