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发明名称
Method for reducing surface layer defects in semiconductor materials having a volatile species
摘要
申请公布号
EP0844653(A3)
申请公布日期
2000.01.12
申请号
EP19970120329
申请日期
1997.11.20
申请人
HUGHES ELECTRONICS CORPORATION
发明人
NGUYEN, CHANH N.;WILSON, ROBERT G.
分类号
H01L21/265;H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/265
代理机构
代理人
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