发明名称 STRONTIUM BISMUTH NIOBATE TANTALATE FERROELECTRIC THIN FILM
摘要 <p>Thin film ferroelectric materials for use in integrated memory circuits, such as FERAMS and the like, contain strontium bismuth niobium tantalate having an empirical formula SrBi2+E(NbXTa2-X)O9+3E/2, wherein E is a number representing an excess amount of bismuth ranging from zero to 2; and X is a number representing an excess amount of niobium ranging from 0.01 to 0.9. The thin films demonstrate an exceptional resistance to polarization imprinting when challenged with unidirectional voltage pulses.</p>
申请公布号 EP0970516(A1) 申请公布日期 2000.01.12
申请号 EP19980906097 申请日期 1998.02.04
申请人 SYMETRIX CORPORATION 发明人 CUCHIARO, JOSEPH, D.;SOLAYAPPAN, NARAYAN;PAZ DE ARAUJO, CARLOS, A.;MCMILLAN, LARRY, D.
分类号 C01G35/00;G11C11/56;H01L21/316;H01L21/8242;H01L21/8246;H01L27/10;H01L27/105;H01L27/108;H01L27/115;H01L29/92;(IPC1-7):H01L21/316;H01L21/320 主分类号 C01G35/00
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