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发明名称
Chemical vapour deposition precursors
摘要
申请公布号
GB9926461(D0)
申请公布日期
2000.01.12
申请号
GB19990026461
申请日期
1998.05.13
申请人
SECRETARY OF STATE FOR DEFENCE, THE
发明人
分类号
C07F7/00;C23C16/18;C23C16/40;H01L21/8246;H01L27/105
主分类号
C07F7/00
代理机构
代理人
主权项
地址
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