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发明名称
SiC SEMICONDUCTOR ARRAY WITH ENHANCED CHANNEL MOBILITY
摘要
申请公布号
EP0970524(A2)
申请公布日期
2000.01.12
申请号
EP19980923998
申请日期
1998.03.12
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
PETERS, DETHARD;SCHOERNER, REINHOLD;STEPHANI, DIETRICH
分类号
H01L29/749;H01L21/04;H01L21/337;H01L29/04;H01L29/06;H01L29/10;H01L29/12;H01L29/24;H01L29/739;H01L29/78;H01L29/808;(IPC1-7):H01L29/04
主分类号
H01L29/749
代理机构
代理人
主权项
地址
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