| 摘要 |
PROBLEM TO BE SOLVED: To reduce deflection of a substrate in conveying it diagonally, vertically, or horizontally. SOLUTION: This hand 1, which is used in a robot conveying a substrate 14 while holding it, has a quadrangular shape with a V-shaped notch part 1a at its front end, and is provided with suction cups 5 sucking the substrate 14 on both sides of the V-shaped notch part 1a and on both sides of the mid-part of the hand, derrickable front-end hooks 5 holding the front end of the substrate 14 in a standing condition at respective front ends on both sides of the V-shaped notch part 1a, a connecting rod 6 whose front ends are connected to the front- end hooks 5 through a link inside the hand and whose rear end is connected to a connecting rod push-pull device 7 mounted at the rear end of the hand, and rear-end hooks 13 mounted on both sides of the rear end of the hand and pressing the rear end part of the substrate 14 by spring force.
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