发明名称 WORK LEVITATING STRUCTURE
摘要 PROBLEM TO BE SOLVED: To establish a lightweight construction of a levitated transporting plate for levitating a work to be transported. SOLUTION: A levitated transporting plate for works is formed from thin metal sheet in such a structure that a box-shaped body 1 having an upper plate 12 furnished with a number of air feeding holes 11 is reinforced with ribs 13. For transporting works, an inclined nozzle 2 and guide part 3 are provided. The ribs 13 have a function of 'tracer guide' so as to control the shape and accuracy of the upper plate, and thereby the weight and cost can be reduced while the structure remains simple. Working precision of ribs accures good accuracy in the flatness of the upper plate 12 to constitute a transporting surface 12a, and it is also possible to comply with any shape of upper plate. The small thickness of upper plate 12 allows easy boring operation, and the air can blow out right over from the holes.
申请公布号 JP2000007151(A) 申请公布日期 2000.01.11
申请号 JP19980188268 申请日期 1998.06.17
申请人 TABAI ESPEC CORP 发明人 TANAKA HIDEKI
分类号 B65G51/03;B65G49/07;B65G49/08;H01L21/677;H01L21/68;(IPC1-7):B65G51/03 主分类号 B65G51/03
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