SAMPLE CUTTING METHOD BY FOCUSED ION BEAM, CROSS SECTION MONITORING METHOD, SAMPLE FIXING STRUCTURE, AND FIXING METHOD

摘要

PROBLEM TO BE SOLVED: To shorten a total cross section monitoring time by reducing a processing time of a sample when the cross section of the sample is monitored by a focused ion beam. SOLUTION: After a sample 5 is fixed to a sample holding plate 10 under a condition that a stress is generated in an inner part, the sample 5 is cut. Thereby, at least one of samples 5a, 5b after cutting is moved due to stress releasing. Then, a monitoring face 12 is formed to the sample 5a so as to carry out cross section monitoring. Thereby, the total time required for monitoring the cross section of the sample with the focused ion beam is significantly reduced compared to the conventional. More particularly, the total required time can be reduced to about 1/2-1/3.