Temperature sensor element, temperature sensor having the same and method for producing the same temperature sensor element

摘要

PCT No. PCT/JP96/01266 Sec. 371 Date Jan. 10, 1997 Sec. 102(e) Date Jan. 10, 1997 PCT Filed May 10, 1996 PCT Pub. No. WO96/35932 PCT Pub. Date Nov. 14, 1996A temperature sensor element for measuring the temperature of exhaust gas from car engines comprises a metallic support having a shape of a flat board, a first electric-insulating film existing on the support, a first temperature sensitive film existing on the first electric-insulating film and having a pair of electrodes, and a second electric-insulating film existing on the temperature sensitive film. The element is superior in thermal shock resistance. The element needs no heat-resistant cap. The element is superior in heat-response since the element has a small heat capacity.