发明名称 Multi-piece lathe chuck for silicon ingots
摘要 Improved chucks for supporting elongate objects having conical end portions, such as single crystal ingots of semiconductor material, while such objects are held and rotated, as in a lathe. A base portion of the chuck includes bores to accept fasteners to fasten the base to a headstock or tailstock of a lathe. The base includes a receptacle for holding an annular chuck insert which has a conical socket surface to engage the body, such as a conical end portion of a single crystal ingot, to be held and rotated. Alternatively, the base may have three or more rollers spaced equally about a central axis and rotatable about roller axes all located in a plane perpendicular to the central axis.
申请公布号 US6012976(A) 申请公布日期 2000.01.11
申请号 US19970843934 申请日期 1997.04.17
申请人 SEH AMERICA, INC. 发明人 AYDELOTT, RICHARD M.;NICE, TRAVIS;BROWN, RICHARD ROBERT
分类号 B24B5/02;B24B5/04;B24B5/50;B24B41/06;(IPC1-7):B24B49/00 主分类号 B24B5/02
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