| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon nitride-base corrosion resistant member comprising a silicon nitride-base sintered compact excellent in heat resistance and capable of suppressing the generation of particles and its production method. SOLUTION: A power contg. β-silicon nitride as a principal phase, 0.1-3 wt.% (expressed in terms of RE2O3) rare earth element (RE), 1-5 wt.% (expressed in terms of Al2O3) aluminum and 1-6 wt.% (expressed in terms of SiO2) excess oxygen in an Al2O3 to RE2O3 ratio of 1-6 and an SiO2 to RE2O3 ratio of 2-15 and contg. <=0.1 wt.%, in total, of other cationic impurities is compacted and pressureless-fired at 1,700-1,800 deg.C in a non-oxidizing atmosphere contg. gaseous SiO to obtain the objective corrosion resistant member comprising a silicon nitride-base sintered compact having >=90% relative density. The member has a surface in contact with corrosive gas or plasma composed of the above sintered compact. |
