SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent a plurality of treatment chambers from being extracted from an outer cover at the same time by regulating the extraction of treatment chambers opposite to extraction regulating plates. SOLUTION: This substrate treatment device has a guide rail 63 mounted on a frame 22A vertically extending along the peripheral edge of the front face 21 of an outer cover 2 and extraction regulating plates 61, 62 slidable on the guide rail 63. The extraction regulating plate 61 can be displaced between a position where it is opposite to the uppermost split space and a position where it is opposite to a mid split space. The extraction regulating plate 62 can be displaced between a position where it is opposite to the mid split space and a position where it is opposite to the lowermost split space.