COMPOSITE CRUCIBLE, ITS PRODUCING METHOD AND REGENERATING METHOD

摘要

PROBLEM TO BE SOLVED: To obtain a composite crucible which is excellent in the material strength, eliminates a fear of the deformation at a high temp. and which can achieve a high crystallization rate of single crystal by making the inner layer of quartz glass and the outer layer of a carbonaceous material in the composite crucible for pulling silicon single crystal and integrating the inner and outer layers into one body. SOLUTION: The outer layer 10 of a crucible is made of a carbonaceous material and the inner layer 20 is made of quartz glass. The carbonaceous material of the outer layer 10 and the quartz glass of the inner layer are tightly adhered into one body to form a composite material. The carbonaceous material to form the outer layer 10 is a solid carbon material such as graphite and carbon fiber. Since the carbonaceous material has excellent heat resistance and high material strength, the composite crucible having excellent dimensional stability at a high temp. is obtained by forming the outer layer from the carbonaceous material. The outer layer is preferably formed from the carbon fiber having 0.1 to 1.0 mm average roughness and a 0.2 to 5 mm average interval of the roughness of the face brought in contact with the quartz glass of the inner layer 20.