| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid coater which applies a coating fluid on a sheet- shaped substrate uniformly and smoothly without generating an application defect such as longitudinal stripe nonuniformity. SOLUTION: An coater 1 for fluid which applies fluid on a sheet-shaped substrate 10 is equipped with a coating fluid supplying means 2 comprising an ultrasonic transducer 20 in which electrodes are arranged on the top and bottom of an arc-shaped piezoelectric ceramic, an ultrasonic transducer 20, an ultrasonic wave generator 60, and a coating fluid tank 48 and a substrate conveying means 4 which sucks/holds the substrate 10 and conveys it. The ultrasonic transducer 20 is installed in the tank 48 so that ultrasonic waves emitted from the transducer 20 by the output of the ultrasonic wave generator 60 are concentrated on the surface 70a of the coating fluid, strong ultrasonic waves are emitted from the transducer 20 to produce coating fluid mist, which is made to adhere to the substrate 10 being conveyed above the coating fluid supplying means 2 by the substrate conveying means 4.
|
