发明名称 |
Stabilization of angular and lateral laser beam position |
摘要 |
The present invention is an apparatus and method for stabilization of laser output beam characteristics by automatically adjusting the angular and the lateral positions of the output beam. A component of the output beam is detected at a far field location and also at a near field location along an optical path of the component. Both the angular and the lateral positions of the output beam are determined, as well as characteristics of the output beam, after the component is detected at both the near and the far field locations. Both the angular position and the lateral position of the output beam are automatically adjusted to optimize the output beam. The adjustment of both the angular position and the lateral position are made possible by using a beam steering device preferably including two mirrors.
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申请公布号 |
US6014206(A) |
申请公布日期 |
2000.01.11 |
申请号 |
US19980162424 |
申请日期 |
1998.09.28 |
申请人 |
LAMBDA PHYSIK GMBH |
发明人 |
BASTING, DIRK;STAMM, UWE;MANN, KLAUS;OHLENBUSCH, JENS |
分类号 |
H01S3/139;G01B11/26;(IPC1-7):G01B11/26 |
主分类号 |
H01S3/139 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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