| 摘要 |
PROBLEM TO BE SOLVED: To reduce the production cost by reacting F2 gas produced by electrolysis of a fluorine compound with a carbon powder, generating CF4 gas, introducing the resultant CF4 gas into a heating furnace at a high temperature and carrying out a treatment for raising the purity. SOLUTION: F2 gas produced in an F2 gas production apparatus 19 is mixed with CF4 gas in a gas mixer 18 of a CF4 synthesis apparatus 11 in a prescribed proportion and the resultant mixed gas is then fed to a reactor 12. Adequate amounts of a carbon powder 13 and a fluoride such as calcium fluoride good in heat conductivity are prefilled in the reactor 12. The CF3 gas discharged from the reactor 12 is repetitively circulated through the reactor 12 with a pump 14 to convert the F2 gas into the CF4 gas without waste. Thereby, the concentration of the CF4 gas is raised. The resultant CF4 gas is then compressed with a pump 16 and fed to a buffer tank 17. A carbon material 24 which is a material to be treated is placed in a heating furnace 22 and atmosphere in the heating furnace 22 is replaced with a nonoxidizing atmosphere. The interior of the furnace 22 is heated to >=1,900 deg.C and the CF4 gas is then introduced from a gas introduction tube 30 to carry out a treatment for raising the purity of the carbon material 24. |
