发明名称 HAND OF CARRIER ROBOT
摘要 PROBLEM TO BE SOLVED: To provide a hand of a carrier robot which does not bring about misoperation of any apparatus to hold a thin base board and has no risk of damaging the thin board. SOLUTION: A hand 1 of a carrier robot to make transporting operation for thin base boards 2 which are at least wet includes a hand part 1A for holding wet board composed of a setting surface 11 on which each wet board 2 is set from above, a plurality of jets 12 which are formed in the setting surface and from which water is spouted, and a step 13 which is formed at the peripheral edge of the setting surface 11 and restrains the board 2 on the surface 11. The hand part 1A carries the restrained board 2 with the spouted water from the jets 12 in the condition that the board 2 is out of contact with the setting surface 11.
申请公布号 JP2000007149(A) 申请公布日期 2000.01.11
申请号 JP19980173333 申请日期 1998.06.19
申请人 MECS CORP 发明人 KIMATA KAZUO;INUKAI YASUHIRO
分类号 B65G49/07;B25J15/06;H01L21/677;H01L21/68;(IPC1-7):B65G49/07 主分类号 B65G49/07
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