发明名称 SUBSTRATE PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent a pulley from conducting idle rotation at the time of adjusting tension, and adjust the tension easily. SOLUTION: A tension adjusting pulley 61 is supported so as to slide on a straight line L1 connecting the centers M of pulleys 48, 49 to each other, inside a frictional transmission belt 50. The diameter of the pulley 61 is set so as to be equal to that of the pulley having a larger diameter of the two pulleys 48, 49.
申请公布号 JP2000006080(A) 申请公布日期 2000.01.11
申请号 JP19980179071 申请日期 1998.06.25
申请人 KOKUSAI ELECTRIC CO LTD 发明人 YUYA YUKINORI
分类号 B65G49/07;B25J17/00;H01L21/677;H01L21/68;(IPC1-7):B25J17/00 主分类号 B65G49/07
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