Substrate processing apparatus

摘要

A substrate processing apparatus which includes a substrate retention mechanism having retention rollers, including a plurality of driving rollers, for holding a substrate by abutting the retention rollers against different peripheral edge portions of the substrate, and a rotative driving mechanism for rotating the plurality of driving rollers. The plurality of driving rollers preferably include a pair of driving rollers generally opposed to each other diametrically of the substrate to be held. Further, the retention rollers preferably all serve as the driving rollers.