发明名称 PHASE DIFFERENCE MEASUREMENT METHOD AND PHASE DIFFERENCE MEASURING DEVICE OF OPTICAL PART USING THE SAME
摘要 PROBLEM TO BE SOLVED: To specify the phase difference and the direction of an optical axis with a simple optical system, by measuring the elliptical rate of a light beam through a sample and the angle between an elliptical long axis and incidence straight-line polarization. SOLUTION: A light beam emitted from a light source 1 is propagated in Z-axis direction, and transmission light of an analyzer 2 is converted into straight-line polarization in X-axis direction. The transmission light of the analyzer 2 generally becomes an elliptical polarization with a long axis in the direction of an angle ofθ=θmax for an incidence straight-line polarization direction (X-axis direction). Then, by rotating an analyzer 4 around a light axis (Z axis) and measuring the output of a photo detector 5, inclination anglesθmax andθmin of the long and short axes for the incidence polarization direction (X axis) are obtained from light intensity Imax and Imin corresponding to the long and short axes of elliptical polarization and the rotary angle of the analyzer 4. By using these values, a phase differenceΔof a sample 3 and an angle formed by the sample 3 and the incidence polarization (namely, an azimuth angleαof the optical axis of the sample 3) can be calculated.
申请公布号 JP2000002652(A) 申请公布日期 2000.01.07
申请号 JP19980170764 申请日期 1998.06.18
申请人 HITACHI LTD 发明人 NAKAO TAKESHI;ONISHI KUNIKAZU
分类号 G01J9/00;G01M11/02;G01N21/23;(IPC1-7):G01N21/23 主分类号 G01J9/00
代理机构 代理人
主权项
地址