| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electrode by which the long-term stability of sensor output is enhanced by forming an anode and a cathode which are to be formed on both faces of a solid electrolyte substrate, which is oxygen-ion conductive, in such a way that iridium and platinum are alloyed by an MOCVD method. SOLUTION: The cathode 9 and anode 10 which use a composite material of iridium and platinum and which are synthesized by an MOCVD method are formed on a solid electrolyte substrate 4, which is oxygen-ion conductive. The electrodes 9, 10 are formed in such a way that iridium acetylacetonate and platinum acetylacetonate as raw materials are gasified and synthesized simultaneously while a mixed gas of argon and oxygen is used as a carrier gas. It is desirable that the concentration of the oxygen in the carrier gas is in a range of 0.04 to 20%. It is desirable that the temperature of their synthesis is at 500 to 750 deg.C. It is preferable that stabilized zirconia using a stabilizer such as yttrium oxide or the like is used as a solid electrolyte. By this constitution, the thermal degradation of the electrodes 9, 10 is suppressed.
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