MICROWAVE EXCITED GAS LASER OSCILLATOR

摘要

PROBLEM TO BE SOLVED: To output a stabilized high peak pulse by driving the switching of power supply entirely with an identical drive signal and feedback controlling the injection variations of each magnetron through voltage control at a constant voltage power supply section. SOLUTION: A master(M) micro(×) wave power supply 4a receives an output command and drives a magnetron by producing a switching signal S1 determining on time of the switching element in an M high voltage switching power supply 41a. A magnetron current outputted from the M high voltage switching power supply 41a and flows between the anode and cathode of the magnetron is detected by an M current detecting element 42a and the output voltage is subjected to feedback control by an M constant voltage power supply 40a such that the magnetron current will have an output command value. All slaveμwave power supply 4b receive a switching signal S1 from the M high voltage switching power supply 41a in the Mμwave power supply 4a and drive the magnetron similarly and then the output voltage is subjected to feedback control such that the magnetron current will have an output command value.