| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer chamfering device to seal a moving mechanism for a wafer without any gap through simple constitution. SOLUTION: An opening part 132A is formed in an oil pan 132 recovering a coolant, so that a chuck table 100 is movable. The lower end part of a cover 134 formed in a cylindrical shape is fixed in the oil pan 132 to shield the opening part 132A. The upper end part of a cover 134 is fixed at a mounting plate 124 mounted on aθshaft motor 96.
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