METHOD OF FILLING OPENING OF INSULATING LAYER

摘要

PROBLEM TO BE SOLVED: To introduce a reaction of enhancing wettability and a principle of forming a seed layer on the basis of a reliable filling process of Al-containing metal. SOLUTION: A method through which an opening provided to an insulating layer is quickly and reliably filled up can be used for filling up an opening such as a trench or a viahole. The method is based on a principle of reaction to entrance wettability and to form a seed layer. In contrast to avoidance of formation of TiAl3, this concept uses this reaction profitably to form a very thin and continuous Al-containing seed layer. Lastly, following Al-containing metal is filled up into an opening from base to top. As a result, a filling process can be very quickly carried out, and a valuable product can be realized.