| 摘要 |
PROBLEM TO BE SOLVED: To prevent X-ray from being absorbed by the remaining gas when the gas is irradiated by an energy beam to generate the X-ray. SOLUTION: Relating to this X-ray generator, gas 14 is diffused with the elapse of time when the compressed gas 14 is ejected into a vacuum container 10 through a gas ejecting part 12. A beam radiation part 16 irradiates the gas 14 with an energy beam 18. The whole or part of the gas 14 is converted into a plasma by irradiation, and X-ray is generated (radiated) from the plasma. The gas 14 irradiated by the energy beam 18 is quickly discharged forcibly by a gas discharging part 20 provided in the vicinity of an irradiating point. Since the gas 14 irradiated by the energy beam 18 is evacuated through the gas discharging part 20 by this manner, the gas 14 does not remain substantially inside the container 10. The generated X-ray is prevented thereby from being absorbed by the remaining gas. |
