发明名称 HEAD STRUCTURE OF HIGH FREQUENCY PROBE
摘要 PROBLEM TO BE SOLVED: To cope with the case that a signal electrode of a device to be measured and a ground electrode are not arranged on the same plane, and to obtain roughly fixed pressure when an electrode part on the head is brought into contact with the signal electrode. SOLUTION: A board 3 having two faces in the direction roughly vertical to a cut surface, and having a mat ground 16, which is a conductor, on the whole surface of one-side plane, and having a central conductor 11 exposed at the cut surface and a signal line 14 connected with electric conduction up to a head part forming a convex part on the other-side surface, is held on a semi-rigid cable 2 having the central conductor 11 and a coated conductor 12 arranged concentrically, and having the cut surface vertical to the central axis direction as an edge face on one side, by a board fixing plate 4 stuck on the mat ground 16 of the board 3 as a board-shaped conductor, and connected with electric conduction to the coating conductor 12, and adhered to the semi- rigid cable 2.
申请公布号 JP2000002716(A) 申请公布日期 2000.01.07
申请号 JP19980167991 申请日期 1998.06.16
申请人 NEC CORP;ANRITSU CORP 发明人 MATSUNAGA KOJI;INOUE HIROBUMI;TANEHASHI MASAO;TAURA TORU;YAMAGISHI YUICHI;HAYAKAWA SATOSHI
分类号 G01R31/26;G01R1/067;H01L21/66;(IPC1-7):G01R1/067 主分类号 G01R31/26
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