| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card excellent in contactability and capable of corresponding flexibly to plural rows of electrodes and having a simple support structure of a probe terminal. SOLUTION: This probe card is equipped with a wiring pattern 3 formed on the surface of a ceramic board 2 and a probe terminal 4 installed on the surface of the wiring pattern 3. The probe terminal 4 is composed of a bonding wire forming a roughly triangle-shaped loop with both ends isolated and welded on the wiring pattern 3, and has such characteristics that a first inclined part 4D is set to have a larger gradient than that of a second inclined part 4E, and that the second inclined part 4E is inclined in two steps with a boundary of a bending part 4F.
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