| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the displacement of a measuring object by non-contact and improve the reliability of measured results in speedily measuring especially two dimensional displacement. SOLUTION: A displacement measuring means 2 mainly scans cast beam against a measuring object in X-axis direction. Simultaneously, a work carrier means 3 subsediarily scans the measuring object in Y-axis direction. From the displacement measuring means 2, two dimensional displacement quantities by simultaneous X-Y axes scan are output. A displacement correction means 6 corrects the measured position shift caused by light cast angle of cast beam. A carrier correction means 7 corrects the measured position shift caused bay simultaneous X-Y scan. Based on the position shift quantities output by the displacement correction means 6 and the carrier correction means 7, a position information conversion means 8 replaces the obtained displacement quantity to exact measured position and stores in a data memory means 5.
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