发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device, wherein its final manufacturing process can be shortened in process term after ROM specifications are determined. SOLUTION: Element isolation regions 12 arranged above a matrix, gate wiring layers 13 arranged above the element isolation regions 12 extending in a certain direction and separating from each other by a prescribed space, and aluminum wiring layers 10 arranged above the gate wiring layers 13 extending in a certain direction so as to cross them and separating from each other by a prescribed space are provided onto a semiconductor substrate so as to specify a channel region 14. The aluminum wiring layers 10 are arranged above the element isolation regions 12.
申请公布号 JP2000003968(A) 申请公布日期 2000.01.07
申请号 JP19980166873 申请日期 1998.06.15
申请人 MITSUBISHI ELECTRIC CORP 发明人 ARITA HIDENORI;MIYATA KAZUAKI
分类号 H01L21/8234;H01L21/8246;H01L23/485;H01L27/112 主分类号 H01L21/8234
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