发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND PATTERN FORMING METHOD USING THAT
摘要 PROBLEM TO BE SOLVED: To enhance the sensitivity of an org. polysilane for photolytic reaction and to shorten the exposure time by incorporating a silver colloid which absorbs light in a visible ray region into a photosensitive resin compsn. SOLUTION: This photosensitive compsn. contains a polysilane having >=10,000 weight average mol.wt. and silver colloid having 1 to 30 nm particle size. As for the polysilane, network or chain-like polysilane or a mixture of these can be used, and the network-like polysilane is most preferable considering the mechanical strength of the photosensitive material. The silver colloid consists of silver colloid particles having 1 to 30 nm particle size and has absorption of light in a UV ray to visible ray region by the color developing mechanism called as plasmon absorption caused by the plasma oscillation of electrons. As for the method to produce the silver colloid, a method to chemically reduce silver ion in a soln. (in-liquid reducing method) is preferable because fine silver colloid particles can be easily and efficiently produced from an easily available silver compd.
申请公布号 JP2000003047(A) 申请公布日期 2000.01.07
申请号 JP19980169880 申请日期 1998.06.17
申请人 NIPPON PAINT CO LTD 发明人 TSUSHIMA HIROSHI
分类号 G03F7/004;G02B5/20;G02F1/1335;G03F7/075 主分类号 G03F7/004
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