LASER PROCESSING DEVICE AND ITS CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To secure stable performance by preventing secular change in the processing performance of a laser processing device. SOLUTION: The maximum intensity of a laser beam is measured by an intensity measuring means while the inclination of the laser beam is measured by an inclination measuring means; on the basis of these measurements, the laser beam output is controlled by the control means 14; and a mirror 6 is movably controlled by an inclination control means 15 so that no change takes place in the incident position and the incident quantity of the laser beam on a homogenizer lens 7. Consequently, change is suppressed in the waveform element that affects the processing by the laser beam, enabling a stable homogeneous laser processing to be performed.