| 摘要 |
PROBLEM TO BE SOLVED: To suppress the evaporation and the deposition of water content in a replenishment tank. SOLUTION: This replenishment tank 22 is constituted of a tank main body 30 and a processing liquid charging funnel 31. The funnel 31 is constituted of a funnel main body 32 and an injection pipe 33. The lower end 33a of the pipe 33 is arranged near the bottom plate 30b of the main body 30. Since a processing liquid 19 in the tank 22 is brought into contact with air at the inside area part of the pipe 33, the evaporation and the deposition of the water content of the processing liquid 19 are suppressed.
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