| 摘要 |
1325919 Making transparent conducting films RCA CORPORATION 22 Dec 1970 [2 Jan 1970] 60780/70 Heading C7F A transparent conductor is formed by R. F. sputtering an In 2 O 3 film which is anion deficient and doped with Sn or Sb, and then heating to form a stoichiometric oxide layer. A movable shutter 36 may be positioned during a cleaning step, between the target 28 and the substrate 34 of e.g. glass. A grounded shield 40 is positioned around the target and a magnetic field may be provided by a coil 42. The target may be rotated and may be formed by hot pressing a powdered mixture of In 2 O 3 and SnO 2 . The sputtering atmosphere may be argon. |
