| 摘要 |
PROBLEM TO BE SOLVED: To reduce deformation owing to dead weight of a flat plate, and to conduct precise measurement in the case of measurement for flatness or the like. SOLUTION: This is a flat plate holding device to hold a flat plate 1 horizontally, and is provided with the first and second support members 2a, 2g and the third and fourth support members 2c, 2d, opposed each other to mount the plate 1, the first - fourth load detecting means 3a, 3b, 3c, 3d for detecting loads of the plate 1 applied to the first - fourth supporting members 2a, 2b, 2c, 2d respectively, a moving means 5 for moving vertically at least one of the first - fourth support members 2a, 2b, 2c, 2d, and a control means 7 for controlling the vertical moving of the means 5 in response to the loads detected by the first - fourth load detecting means 3a, 3b, 3c, 3d.
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