MEMBRANE-SUPPORTED CONTACTOR FOR SEMICONDUCTOR TEST

摘要

A method and apparatus are described for providing electrical connection between a first array of contact points (400) and a second array of contact points (310) via a layer of anisotropically conductive material (200) in contact with the second array of contact points (310). A membrane (110) is provided having a plurality of apertures therein for receiving the first array of contact points (400). A plurality of electrical contacts (100) is also provided, each of the electrical contacts (100) being coupled to the membrane (110) and at least partially in registration with one of the plurality of apertures. The electrical contacts (100) are for contacting the first array of contact points (400) through the plurality of apertures. The electrical contacts (100) are also for electrically connecting to the second array of contact points (310) via the layer of anisotropically conductive material (200). Each of the electrical contacts (100) is operable to move substantially independently of adjacent electrical contacts (100).