发明名称 |
CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER/TANTALUM SUBSTRATE |
摘要 |
The present invention is a first CMP slurry including an abrasive, an oxidizing agent, a complexing agent, a film forming agent and an organic ami no compound, a second polishing slurry including an abrasive, an oxidizing agen t, and acetic acid wherein the weight ratio of the oxidizing agent to acetic ac id is at least 10 and a method for using the first and second polishing slurrie s sequentially to polish a substrate containing copper and containing tantalum or tantalum nitride or both tantalum and tantalum nitride.
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申请公布号 |
CA2335033(A1) |
申请公布日期 |
2000.01.06 |
申请号 |
CA19992335033 |
申请日期 |
1999.06.25 |
申请人 |
CABOT MICROELECTRONICS CORPORATION |
发明人 |
KAUFMAN, VLASTA BRUSIC;WANG, SHUMIN;KISTLER, RODNEY C. |
分类号 |
C09G1/02;C09K3/14;H01L21/304;H01L21/321;(IPC1-7):C09K3/14 |
主分类号 |
C09G1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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