发明名称 Mechanical and electric coupling integrated circuits
摘要 The integrated circuits are coupled together or to active or passive electronic or mechanical components. Connection is carried out by layered solidifying of liquid photohardening plastics. During the laminated buildup of the module are formed recesses for retaining the system components and connection ducts for the electrically conductive links between the embedded system components, with the latter arranged in several planes. The process uses conductive track masks, removed by plasma etching.
申请公布号 DE19826971(A1) 申请公布日期 2000.01.05
申请号 DE19981026971 申请日期 1998.06.18
申请人 GOETZEN, REINER;HERBST, DIETER 发明人 GOETZEN, REINER;HERBST, DIETER
分类号 H01L21/48;H01L21/56;H01L21/98;H01L23/29;H01L23/31;H01L23/538;(IPC1-7):H05K3/30;H01L21/60;H01L25/04 主分类号 H01L21/48
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