发明名称 |
Mechanical and electric coupling integrated circuits |
摘要 |
The integrated circuits are coupled together or to active or passive electronic or mechanical components. Connection is carried out by layered solidifying of liquid photohardening plastics. During the laminated buildup of the module are formed recesses for retaining the system components and connection ducts for the electrically conductive links between the embedded system components, with the latter arranged in several planes. The process uses conductive track masks, removed by plasma etching.
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申请公布号 |
DE19826971(A1) |
申请公布日期 |
2000.01.05 |
申请号 |
DE19981026971 |
申请日期 |
1998.06.18 |
申请人 |
GOETZEN, REINER;HERBST, DIETER |
发明人 |
GOETZEN, REINER;HERBST, DIETER |
分类号 |
H01L21/48;H01L21/56;H01L21/98;H01L23/29;H01L23/31;H01L23/538;(IPC1-7):H05K3/30;H01L21/60;H01L25/04 |
主分类号 |
H01L21/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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