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Fotoresistzusammensetzung
摘要
申请公布号
DE69605381(D1)
申请公布日期
2000.01.05
申请号
DE1996605381
申请日期
1996.09.19
申请人
TOKYO OHKA KOGYO CO., LTD.
发明人
SATO, MITSURU;NITTA, KAZUYUKI;HADA, HIDEO;HASHIGUCHI, TATSUYA;KOMANO, HIROSHI;NAKAYAMA, TOSHIMASA
分类号
G03F7/004;G03F7/038;G03F7/039;H01L21/027;(IPC1-7):G03F7/004
主分类号
G03F7/004
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代理人
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