发明名称 |
Probe-to-specimen contact in an acceleration sensor element |
摘要 |
An acceleration sensor element (1) is fastened to an adapter unit (4) with an elastic ring-shaped end. The adapter unit is fitted on an object's probe-to-specimen contact surface (2). A connector (6) to a vacuum pump links up a cubic capacity, enclosed between the probe-to-specimen contact surface and the adapter.
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申请公布号 |
DE19829687(A1) |
申请公布日期 |
2000.01.05 |
申请号 |
DE19981029687 |
申请日期 |
1998.07.03 |
申请人 |
SCHENCK ROTEC GMBH |
发明人 |
SULZMANN, HERBERT;GIMPEL, HORST |
分类号 |
G12B9/08;G01D11/30;G01H1/00;G01H1/12;G01M1/02;G10K11/00;(IPC1-7):G01M1/02;G01M1/14;G01M7/02 |
主分类号 |
G12B9/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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