发明名称 Probe-to-specimen contact in an acceleration sensor element
摘要 An acceleration sensor element (1) is fastened to an adapter unit (4) with an elastic ring-shaped end. The adapter unit is fitted on an object's probe-to-specimen contact surface (2). A connector (6) to a vacuum pump links up a cubic capacity, enclosed between the probe-to-specimen contact surface and the adapter.
申请公布号 DE19829687(A1) 申请公布日期 2000.01.05
申请号 DE19981029687 申请日期 1998.07.03
申请人 SCHENCK ROTEC GMBH 发明人 SULZMANN, HERBERT;GIMPEL, HORST
分类号 G12B9/08;G01D11/30;G01H1/00;G01H1/12;G01M1/02;G10K11/00;(IPC1-7):G01M1/02;G01M1/14;G01M7/02 主分类号 G12B9/08
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