Device for application of microwaves to generate plasmas in vacuum environment with and without use of electron resonance

摘要

A device has a magnetron (1) coupled directly to a coaxial conductor length (3). Matching to a load impedance is via a signal extraction and suitable tuning elements. A suitable vacuum separation of the device is undertaken. The matching to the load impedance takes place by transformation members in the coaxial conductor length and additionally by a non-contact plunger (5). The non-contact plunger and the magnetron connection can be exchanged in their mechanical arrangement and thus an introduction of process gases through the inner conductor of the coaxial length is made possible.