发明名称 Process for fabricating a thin film transistor
摘要 A semiconductor device comprising at least two thin film transistors on a substrate having an insulating surface thereon, provided that the thin film transistors are isolated by oxidizing the outer periphery of the active layer of each of the thin film transistors to the bottom to provide an oxide insulating film.
申请公布号 US6010924(A) 申请公布日期 2000.01.04
申请号 US19970853187 申请日期 1997.04.29
申请人 发明人
分类号 H01L21/762;H01L21/336;H01L21/77;H01L21/84;H01L29/04;H01L29/78;H01L29/786;(IPC1-7):H01L21/336;H01L21/31 主分类号 H01L21/762
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