Optical arrangement for several individual beams with a segmented mirror field

摘要

An optical arrangement includes several separate individual beams that pass through a common focus before a first segmented mirror field and, after reflection by respective separate mirrors of the segmented mirror field, the individual beams are imaged by an objective on one or more workpieces. A second segmented mirror field is arranged between the first segmented mirror field and the object, or at least one beam splitter is arranged after the focus and deflects the individual beams onto at least one segmented mirror field, by which they are reflected back at least nearly identically on themselves.