发明名称 Universal mapping tool
摘要 A universal mapping tool and method for mapping workpieces, such as semiconductor devices, is disclosed and described. The tool comprises a fixed and a movable gripping means adapted to mount a wide range of workpieces, means for optically locating the physical center of the workpiece fiducials mounted on the gripping means, and means for interpreting and storing the data obtained in the mapping operation.
申请公布号 US6011627(A) 申请公布日期 2000.01.04
申请号 US19980056457 申请日期 1998.04.07
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 MULLIGAN, VINCENT P.;FLORENCE, JR., ROBERT F.;TOMPKINS, JR., CHARLES R.;YUEN, WING-FUNG
分类号 G01B11/03;H01L21/00;(IPC1-7):G01B11/14 主分类号 G01B11/03
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