发明名称 Electrode with domes for plasma focusing
摘要 An improved anode design, incorporating domes, for plasma reactors enhances plasma density at the anode. The domes give rise to a high-divergence, three-dimensional electric field distribution that accelerates electrons to a focused central region in the dome, thereby increasing ionization and dissociation. The enhanced plasma density increases the reaction rate at a substrate opposite the anode.
申请公布号 US6010636(A) 申请公布日期 2000.01.04
申请号 US19950581127 申请日期 1995.12.29
申请人 LAM RESEARCH CORPORATION 发明人 DONOHUE, JOHN F.;SAMPSON, AL
分类号 H01J37/32;(IPC1-7):H05H1/00 主分类号 H01J37/32
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